Successful MEMS suppliers verify all aspects of their designs with simulations before sending them to the fab. Successful MEMS suppliers use the CoventorWare® design and simulation platform.
Accelerometer model built in CoventorWare with a process design kit (PDK) for imec’s monolithic MEMS/CMOS process
CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. The suite has many MEMS-specific features for modeling and simulating a wide range of MEMS devices, including inertial sensors (accelerometers and gyros ) microphones, resonators and actuators. The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects.
Simulated displacement due to fabrication-induced residual stress in mechanical layer of an accelerometer
Whether exploring design concepts or performing detailed verification of device behavior, CoventorWare users leverage years of Coventor’s MEMS simulation experience and continuous improvement as well as the ever-increasing power of high-performance computers. Widely recognized within the MEMS industry as the best-in-class solution for multi-physics MEMS simulation, CoventorWare sets the standard for MEMS simulation accuracy, capacity and speed.